Title :
Micromachined piezoelectric devices for acoustic applications
Author :
Tian-Ling Ren ; Yi Shu ; Yi Yang ; Chang-Jian Zhou ; Yu-feng Wang ; He Tian ; Chang-Hai Zhang ; Hui Sun ; Xuan Liu
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing, China
Abstract :
Micromachining technology has been widely used to reduce the device volume and improve the reliability. Piezoelectric devices can utilize the effects of piezoelectricity and inverse piezoelectricity to generate and detect acoustic vibration. This paper presents an overview of micromachined piezoelectric devices working in several different frequency ranges and their specific applications. The device configuration and chief fabrication process are discussed.
Keywords :
micromachining; microphones; piezoelectric devices; piezoelectricity; reliability; ultrasonic devices; acoustic vibration; device configuration; inverse piezoelectricity; micromachined piezoelectric devices; micromachining technology; reliability; Arrays; Fabrication; Film bulk acoustic resonators; Frequency measurement; Piezoelectric devices; Resonant frequency; FBAR; MEMS; acoustic; micromachined devices; microphone; microspeaker; pMUT; piezoelectric;
Conference_Titel :
Electron Devices and Solid State Circuit (EDSSC), 2012 IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
978-1-4673-5694-7
DOI :
10.1109/EDSSC.2012.6482856
