Title :
Characteristics of MEMS scanners with different driving bias
Author :
Tantipiriyakij, P. ; Sankatumvong, P. ; Sarapukdee, P. ; Rattanavarin, S. ; Jarujareet, U. ; Khemthongcharoen, N. ; Ruangphacha, A. ; Il Woong Jung ; Piyawattanametha, Wibool
Author_Institution :
Nat. Electron. & Comput. Center, Pathumthani, Thailand
Abstract :
In this paper, two different designs of two-dimensional MEMs scanner were tested to find their characteristic responses in dynamic mode by applying a fixed voltage at different electrical biasing waveforms: sinusoidal, triangle, square and saw-tooth waveforms. The collected data from the experiment has proven that the significance of MEMS scanner design and driving input signals.
Keywords :
micromechanical devices; waveform analysis; MEMS scanners; characteristic response; driving bias; electrical biasing waveforms; saw-tooth waveforms; sinusoidal waveforms; square waveforms; triangle waveforms; Cervical cancer; Laser beams; Micromechanical devices; Microscopy; Mirrors; Resonant frequency; 2-D MEMs scanner; cervical cancer; confocal microscope; frequency responses; mechanical angle;
Conference_Titel :
Electron Devices and Solid State Circuit (EDSSC), 2012 IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
978-1-4673-5694-7
DOI :
10.1109/EDSSC.2012.6482858
