A novel high precision electromagnetic flexure-suspended positioning stage with an eddy current damper

This paper proposes a novel planar electromagnetic-actuated positioning stage. The stage is suspended by the monolithic parallel flexure mechanism, which motion comes from the deformation of the flexure. A linear electromagnetic actuator which consists of a near-uniform magnetic field and four coils is designed and implementation to provide the propelling force for 3-DOF motions. In order to suppress the vibration of the flexure suspension mechanism, an eddy current damper is designed and integrated with the electromagnetic actuator. The non-contact damper is more advanced than the contact damper used in our previous researches. The design traveling range is 3 mm times 3 mm in planar motion. The experimental results show the vibration of the flexure mechanism could be suppressed by the designed eddy current damper. The results also show the regulation and tracking performance by a well-designed robust adaptive sliding mode controller, which can overcome the disturbance and modeling uncertainty and guarantee a satisfactory performance.