Title :
Electrostatic control and its analysis of roller transferring processes in FPD manufacturing
Author :
Dong-Sun Kim ; Chun-Bae Lim ; Sung-Hyuk Yoon ; Seung-Won Jung ; Du-Seok Oh ; Jung-Tae Kim ; Hyung-Tae Kim ; Won-Joon Ho ; Soo-Youle Cha ; Yoo, Jerald ; Suh, Kwang S.
Author_Institution :
OLED Panel Group, LG Display, Paju, South Korea
Abstract :
In recent years, the structure of a-Si based TFTs have been getting more complex and glass transferring by conveyor rollers during each process were increased accordingly. Static electricity in transferring processes is becoming a major issue because most companies to pursue high productivity. In this paper, we analyzed a point defect which was induced by electrostatic discharge event in transferring processes. Based on the analysis, we proposed the effect of ionization to minimize triboelectric charge in glass transferring systems.
Keywords :
electrostatic discharge; elemental semiconductors; point defects; rollers (machinery); silicon; thin film transistors; FPD manufacturing; Si; TFT; conveyor rollers; electrostatic control; electrostatic discharge event; glass transferring; point defect; roller transferring process; static electricity; triboelectric charge; Electrodes; Electrostatic discharges; Electrostatics; Glass; Metals; Thin film transistors;
Conference_Titel :
Electrical Overstress/Electrostatic Discharge Symposium (EOS/ESD), 2013 35th
Conference_Location :
Las Vegas, NV
