FDT Series High Voltage Pulse Generators for Plasma Chemistry Applications

Summary form only given. A new series of high voltage all-solid-state pulse generators for plasma chemistry and gas discharge applications has been developed. Generators of FDT series have pulse duration of 1-100 ns and voltage amplitude of up to 100 kV. Pulse shape can be square or bell-like. All pulsers of this series can operate at the pulse repetition rate of up to 100 kHz in continuous mode. The generators are designed to operate into non linear loads which can change from tens of kiloohms to tens of ohms in few nanoseconds. They also are capable of withstanding short term states of short and open circuit at full output voltage and pulse repetition rate. A series of multichannel pulse generators with synchronous output has teen developed. These pulsers can operate into distributed load. Total efficiency of generators reaches 80-90%. In most cases an air cooling can be implemented.