Title :
Fully-automated line-width measurement system and its applications
Author :
Yoshizawa, Masahiro ; Wada, Kou
Author_Institution :
NTT LSI Labs., Kanagawa, Japan
Abstract :
The authors describe a fully automated line-width measurement system featuring highly accurate positioning, an optimal beam control method for highly accurate autofocusing and charge-up-free measurement, and parallel processing of measurements and the handling of data by a remote workstation. The electrooptic column continuously alters voltage in the low 500-1500 range. A repeatability of less than 0.01 μm has been obtained in the fully automated mode
Keywords :
computerised instrumentation; integrated circuit testing; large scale integration; spatial variables measurement; 500 to 1500 V; autofocusing; electrooptic column; line-width measurement system; optimal beam control method; parallel processing; positioning; remote workstation; repeatability; Acceleration; Automatic control; Electrons; Laboratories; Large scale integration; Laser feedback; Optimal control; Particle beams; Position measurement; Voltage;
Conference_Titel :
Microelectronic Test Structures, 1991. ICMTS 1991. Proceedings of the 1991 International Conference on
Conference_Location :
Kyoto
Print_ISBN :
0-87942-588-1
DOI :
10.1109/ICMTS.1990.161727
