DocumentCode :
1622973
Title :
Biomedical Zirconia Films Synthesized by Cathodic Arc Plasma Deposition
Author :
Liu, Xuanyong ; Li, Weifeng ; Huang, Anping ; Chu, Paul K.
Author_Institution :
Chinese Acad. of Sci., Shanghai
fYear :
2007
Firstpage :
523
Lastpage :
523
Abstract :
Zirconia (ZrO2) thin films were deposited on silicon using a zirconium cathodic arc plasma source in the presence of oxygen following by thermal treatment at various temperatures. The structure and phase composition of the zirconia films were investigated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). The bone bioactivity of the as-deposited and heat-treated ZrO2 films was evaluated by soaking them in simulated body fluids (SBF) for different time durations. The tetragonal phase predominates in the ZrO2 film and its surface microstructures strongly depend on the processing conditions such as substrate temperature during deposition, sample bias, and annealing temperature. The particle size which increases with higher annealing temperature is smaller than 100 nm in spite of annealing at 1000C for 2 hours. Bone-like apatite was found to form on the surface of the as-deposited ZrO2 film in our SBF immersion experiments, suggesting that the surface is bioactive. However, the bioactivity of the film deteriorated after thermal treatment suggesting that the bioactivity of the ZrO2 films depends on the particle size in the near surface. The nano-structured surface is believed to be the key factor to induce apatite precipitation on the ZrO2 film surface.
Keywords :
biomedical materials; bone; crystal microstructure; nanobiotechnology; plasma deposited coatings; surface structure; thin films; annealing temperature; apatite precipitation; biomedical zirconia films; bone bioactivity; bone-like apatite; cathodic arc plasma deposition; nanostructured surface; particle size; phase composition; silicon deposition; simulated body fluids; substrate temperature; surface microstructures; tetragonal phase; thermal treatment; zirconia structure; zirconia thin films; Annealing; Atomic force microscopy; Photoelectron microscopy; Plasma sources; Plasma temperature; Plasma x-ray sources; Scanning electron microscopy; Surface treatment; Temperature dependence; Transmission electron microscopy;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 2007. ICOPS 2007. IEEE 34th International Conference on
Conference_Location :
Albuquerque, NM
ISSN :
0730-9244
Print_ISBN :
978-1-4244-0915-0
Type :
conf
DOI :
10.1109/PPPS.2007.4345829
Filename :
4345829
Link To Document :
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