A monolithic micro fuel cell based on a functionalized porous silicon membrane

Due to the recent advances in the microsystems field a new group of applications based in wireless applications have arisen. In order to provide these devices with the working autonomy that they need, micro direct methanol fuel cells emerge as a suitable solution because of the high energy density of the used fuel. The main challenge regarding micro fabrication technology is the fabrication of the different parts of the fuel cell as a single device. In this work different approaches of silicon-based porous membranes for micro fuel cell applications are presented. Fabrication and characterization as a proton exchange membrane of all of them has been carried out in order to drive towards a final monolithic device.