Title :
Simulation of a planar micro Ion Mobility Spectrometer for security applications
Author :
Cumeras, R. ; Grácia, I. ; Figueras, E. ; Fonseca, L. ; Santander, J. ; Salleras, M. ; Calaza, C. ; Sabaté, N. ; Cané, C.
Author_Institution :
Dept. of Micro & Nano Syst., Inst. de Microelectron. de Barcelona, Barcelona, Spain
Abstract :
Simulations of a planar micro Ion Mobility Spectrometer (μIMS) for sensing DMMP and Acetone vapours for security applications are performed. In μIMS ions are discriminated by the application of the proper separation voltages to the electrodes of the system. By simulation, optimum voltages for achieving the proper sensitivity have been obtained.
Keywords :
gas sensors; ion mobility; security; spectrometers; DMMP; acetone vapours; electrodes; planar micro ion mobility spectrometer; security; Chemicals; Detectors; Electric fields; Electrodes; Ions; Security; Software;
Conference_Titel :
Advanced Semiconductor Devices & Microsystems (ASDAM), 2010 8th International Conference on
Conference_Location :
Smolenice
Print_ISBN :
978-1-4244-8574-1
DOI :
10.1109/ASDAM.2010.5667017
