• DocumentCode
    1623167
  • Title

    Metal-Oxide-Junction, Triple-Point Cathodes for High Current Vacuum Electron Devices

  • Author

    Jordan, N.M. ; Gilgenbach, R.M. ; Lau, Y.Y. ; Hoff, B.W. ; Cruz, E.J. ; French, D.M. ; Gomez, M.R. ; Pengvanich, P. ; Zier, J. ; Jones, M.C.

  • Author_Institution
    Michigan Univ., Ann Arbor
  • fYear
    2007
  • Firstpage
    531
  • Lastpage
    531
  • Abstract
    Previous experiments at the University of Michigan have explored the mechanism of electron emission from triple points (vacuum-conductor-dielectric interface) for application to high current cathodes. Recent experiments have fabricated metal-oxide junction (MOJ) cathodes consisting of hafnium oxide (HfO2) coatings over metal (#304 stainless steel) substrates. High dielectric constant HfO2 coatings are deposited by ablation-plasma-ion lithography (APIL) using a KrF laser at 248 nm and 50 J/cm2 fluence. Experiments were performed on the Michigan Electron Long-Beam Accelerator (MELBA), with a relativistic magnetron, at parameters V=-300 kV, currents 1-15 kA, and pulse-lengths of 0.3-0.5 microseconds. Preliminary experiments tested three cathode configurations: 1) stainless steel cathode - no coating 2) stainless steel cathode - totally coated with HfO2 (approximately 0.5 microns thick), and 3) stainless steel cathode - coated with patterned arrays of HfO2 islands Experimental data show initial peak currents for the third case, HfO2 islands, reached an average of 6 kA, which was 60% larger than either of the other two cases. Current turn-on and rise time are also significantly faster for the patterned arrays of HfO2. Future experiments will explore the effect of another innovative cathode consisting of HfO2 dielectric islands exposed to vacuum between two conductors, (cathode and a top metal layer). A semi-analytic theory is developed to assess electron multiplication in the immediate vicinity of a triple point.
  • Keywords
    cathodes; electron emission; electron multipliers; hafnium compounds; magnetrons; stainless steel; FeCCrJk; HfO2; Michigan Electron Long-Beam Accelerator; ablation-plasma-ion lithography; current 1 kA to 15 kA; dielectric constant; electron emission; electron multiplication; hafnium oxide coatings; high current vacuum electron devices; metal-oxide-junction cathodes; relativistic magnetron; stainless steel cathodes; time 0.3 ms to 0.5 ms; triple-point cathodes; wavelength 248 nm; Cathodes; Coatings; Dielectric substrates; Electron devices; Electron emission; Hafnium oxide; High-K gate dielectrics; Laser ablation; Lithography; Steel;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2007. ICOPS 2007. IEEE 34th International Conference on
  • Conference_Location
    Albuquerque, NM
  • ISSN
    0730-9244
  • Print_ISBN
    978-1-4244-0915-0
  • Type

    conf

  • DOI
    10.1109/PPPS.2007.4345837
  • Filename
    4345837