Title :
A 4-bit miniature X-band MEMS phase shifter using switched-LC networks
Author :
Tan, G.L. ; Mihailovich, R.E. ; Hacker, J.B. ; DeNatale, J.F. ; Rebeiz, G.M.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA
Abstract :
A compact 4-bit true-time-delay MEMS phase shifter fabricated on 8-mil GaAs substrate is described. Miniaturization of the phase shifter is achieved using phase shift networks based on semi-lumped LC circuits and a compact SP2T switch configuration. Trade-off in size and loss is performed to achieve a phase shifter with an area of 7 mm/sup 2/ and an average insertion loss of -1.47 dB at 9.4 GHz. The phase shifter has a measured return loss of < -10.5 dB over 8-12 GHz and an RMS phase error of 2/spl deg/ at 9.4 GHz.
Keywords :
micromechanical devices; microwave phase shifters; switched networks; -1.47 dB; -10.5 dB; 4 bit; 8 mil; 8 to 12 GHz; 9.4 GHz; GaAs; GaAs substrate; SP2T switch; X-band true-time-delay MEMS phase shifter; insertion loss; return loss; semi-lumped LC circuit; switched LC network; Circuits; Computer hacking; Diodes; Gallium arsenide; Inductors; Micromechanical devices; Microswitches; Phase shifters; Phased arrays; Switches;
Conference_Titel :
Microwave Symposium Digest, 2003 IEEE MTT-S International
Conference_Location :
Philadelphia, PA, USA
Print_ISBN :
0-7803-7695-1
DOI :
10.1109/MWSYM.2003.1210415
