DocumentCode :
1624546
Title :
Integrated RF MEMS phase shifters with constant phase shift
Author :
Ko, Y.J. ; Park, J.Y. ; Bu, J.U.
Author_Institution :
LG Electron. Inst. of Technol., Seoul, South Korea
Volume :
3
fYear :
2003
Firstpage :
1489
Abstract :
In this paper, fully integrated RF MEMS phase shifters with low insertion loss, narrow frequency band, and constant phase shift are designed, fabricated, and characterized for mobile satellite broadcasting/communication systems. The fabricated phase shifters are comprised of CPW lines, short/open ended-stubs, and RF MEMS capacitive shunt switches. The constant phase shift can be obtained by optimizing the length of the open-ended stub and the short-ended stub. The fabricated 3-bit phase shifter has insertion loss of avg. -2.0 dB, return loss of min. -10 dB, and phase error of avg. 2.0/spl deg/, respectively. The utilized RF MEMS switches are operated at between 15 and 20 volts.
Keywords :
coplanar waveguide components; microswitches; phase shifters; -10 dB; -2.0 dB; 15 to 20 V; 3 bit; CPW line; RF MEMS phase shifter; capacitive shunt switch; insertion loss; mobile satellite broadcasting; mobile satellite communication system; open-ended stub; return loss; short-ended stub; Equations; Frequency; Insertion loss; Phase shifters; Phased arrays; Radar antennas; Radiofrequency microelectromechanical systems; Satellite broadcasting; Switches; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microwave Symposium Digest, 2003 IEEE MTT-S International
Conference_Location :
Philadelphia, PA, USA
ISSN :
0149-645X
Print_ISBN :
0-7803-7695-1
Type :
conf
DOI :
10.1109/MWSYM.2003.1210418
Filename :
1210418
Link To Document :
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