DocumentCode
1624624
Title
Experimental test of Godyak and Sternberg´s collisional sheath model
Author
Kamal, Hanan ; Hershkowitz, Noah
Author_Institution
Kuwait Univ., Safat, Kuwait
fYear
1998
Firstpage
166
Abstract
Summary form only given, as follows. An emissive probe is used to measure sheath potential profiles in an argon dc glow discharge operated at 0.1 or 1.0 Torr. The emissive probe is operated in the limit of zero electron emission. Experimental data are found to be in a good qualitative agreement with the new boundary condition (a finite electric field) based on the works of Godyak and of Godyak and Sternberg. The ion velocity at the sheath edge (inferred from the measured electric field) is found to be much smaller than the ion sound speed (as predicted in the model). Ion velocities much less than the Bohm velocity are a consequence of ion collision mean-free-paths that are comparable to or smaller than the electron Debye length as first described by Persson. A fluid equation based analysis is presented to demonstrate the transition from Bohm-like behavior at low collisionality to Persson-like behavior at high collisionality making clear the role of electric fields at the sheath boundary.
Keywords
argon; 0.1 to 1.0 torr; Ar; Ar DC glow discharge; Bohm velocity; Bohm-like behavior; collisional sheath model; electric fields; electron Debye length; emissive probe; finite electric field; fluid equation based analysis; ion velocity; mean-free-paths; zero electron emission; Argon; Boundary conditions; Electric variables measurement; Electron emission; Equations; Glow discharges; Predictive models; Probes; Testing; Velocity measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location
Raleigh, NC, USA
ISSN
0730-9244
Print_ISBN
0-7803-4792-7
Type
conf
DOI
10.1109/PLASMA.1998.677625
Filename
677625
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