Title :
BaTiO3 based Carbon-dioxide gas sensor
Author :
Rudraswamy, S.B. ; Basu, Palash Kumar ; Bhat, Nagaraj
Author_Institution :
Dept. of Electr. Commun. Eng., Indian Inst. of Sci., Bangalore, India
Abstract :
BaTiO3 based thin films are evaluated for their Carbon dioxide sensing characteristics are been presented in this paper. The metal oxide films of 18nm, 37nm and 55 nm thicknesses are deposited on oxidized p-Si (100) substrate by RF-Sputtering. The effect of annealing on sensing properties is evaluated. The 55 nm thick unannealed films show the highest sensitivity of 10% for 500ppm of CO2, at an operating temperature of 200°C.
Keywords :
annealing; barium compounds; carbon compounds; gas sensors; semiconductor thin films; sputter deposition; BaTiO3; BaTiO3 based thin films; CO2; RF sputtering; Si; annealing effect; carbon-dioxide gas sensor; metal oxide films; oxidized p-Si (100) substrate; sensitivity; size 18 nm to 55 nm; temperature 200 degC; Annealing; Optical device fabrication; Optical films; Optical sensors; Silicon; BaTiO3; Carbon dioxide; Gas sensor;
Conference_Titel :
Emerging Electronics (ICEE), 2012 International Conference on
Conference_Location :
Mumbai
Print_ISBN :
978-1-4673-3135-7
DOI :
10.1109/ICEmElec.2012.6636269
