Radial analysis of a C/sub 2/F/sub 6/ inductively coupled plasma using optical emission spectroscopy and laser induced fluorescence

Summary form only given, as follows. A C/sub 2/F/sub 6/ discharge in a GEC rf reference cell equipped with an inductively coupled source has been analyzed using laser induced fluorescence and spatially resolved optical emission spectroscopy. Experiments were conducted approximately 1 cm above the lower electrode for C/sub 2/F/sub 6/ and C/sub 2/F/sub 6//Ar discharges at pressures ranging from 5 mTorr to 20 mTorr and inductive electrode power ranging from 100 W to 300 W. A 30 W bias was placed on the bottom electrode for all experiments. A 6 inch bare silicon wafer was used to represent processing conditions. A quartz ring was clamped to the top electrode to provide discharge stability. Radial profiles of optical emission were obtained using a novel glow discharge tomography sensor and regularized inversion solver. The 488 nm SiF line and the 703 nm F line were profiled, as well as the 750.4 nm Ar line in the C/sub 2/F/sub 6//Ar runs in order to conduct spatially resolved actinometry of fluorine. Spatially resolved ground state radical density profiles were measured by laser induced fluorescence.