Object-oriented simulation to support operator decision making in semiconductor manufacturing

The authors describe research on the development of a high-fidelity simulator using the object-oriented programming paradigm. The simulator models the complex interactions in reentrant flow manufacturing facilities. In addition to potentially providing better estimates on throughput, work-in-progress levels, and bottleneck resources in the modeled system, the simulator serves as a platform to investigate issues of operator cross-training, decision aiding, and the effect of operator decisions in such manufacturing facilities. The authors describe the class hierarchy of objects required for modeling and analysis of semiconductor and thin films fabrication, and discuss their approach to modeling complex supervisory control decisions in reentrant flow lines