Title :
Silicon multi-project wafer platforms for optoelectronic system integration
Author :
Zhang, Yi ; Baehr-Jones, Tom ; Ding, Ran ; Pinguet, Thierry ; Xuan, Zhe ; Hochberg, Michael
Author_Institution :
Electr. Eng., Univ. of Washington, Seattle, WA, USA
Abstract :
We report on several multi-project wafer (MPW) platforms for optoelectronic systems, which support monolithic integration of modulators and detectors at 25 Gb/s or higher. We also describe the Luxtera platform, which includes CMOS integration.
Keywords :
CMOS integrated circuits; integrated optoelectronics; monolithic integrated circuits; optical modulation; photodetectors; silicon-on-insulator; wafer-scale integration; CMOS integration; Luxtera platform; MPW platforms; Si; bit rate 25 Gbit/s; detectors; modulators; monolithic integration; optoelectronic system integration; silicon multiproject wafer platforms; Bandwidth; CMOS integrated circuits; Gratings; Modulation; Optical waveguides; Photonics; Silicon; electrooptic modulators; foundries; integrated optics; integrated optoelectronics; optical interconnections; optical waveguides; photodetectors; photonics; wafer scale integration;
Conference_Titel :
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0826-8
DOI :
10.1109/GROUP4.2012.6324087
