Title :
A temperature sensor based on silicon eye-like microring with sharp asymmetric fano resonance
Author :
Qiu, C. ; Hu, T. ; Yu, P. ; Shen, A. ; Wang, F. ; Jiang, X.Q. ; Yang, J.Y.
Author_Institution :
Dept. of Inf. Sci. & Electron. Eng., Zhejiang Univ., Hangzhou, China
Abstract :
A high sensitivity photonic temperature sensor based on silicon eye-like microring resonator system (EMRS) is reported. The results show great enhancement of the sensing performance by using the EMRS configuration.
Keywords :
elemental semiconductors; micro-optomechanical devices; micromechanical resonators; microsensors; optical resonators; optical sensors; silicon; temperature sensors; EMRS configuration; Si; high sensitivity photonic temperature sensor; sensing performance; sharp asymmetric Fano resonance; silicon eye-like microring resonator; Optical ring resonators; Optimized production technology; Sensitivity; Silicon; Temperature measurement; Temperature sensors;
Conference_Titel :
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0826-8
DOI :
10.1109/GROUP4.2012.6324107
