Title :
Fast automatic failbit analysis for DRAMs
Author :
Malzfeldt, W. ; Mohr, W. ; Oberle, H.-D. ; Kodalle, K.
Author_Institution :
Siemens AG, Munich, West Germany
Abstract :
Technological failures of DRAMs (dynamic random-access memories) show up in different fault patterns in the failbit map. An automatic program has been developed for testing, fault pattern recognition, classification, and determination of fault class distributions on chips and wafers. The analysis system consists of an ADVANTEST T 3332 memory tester and an ADVANSTAR network with a connection to a remotely located mainframe computer. Selected wafers are tested using the same test conditions as in the production test program in order to reproduce the failbit patterns. The fast automatic failbit analysis was first installed for a 1M DRAM and was later updated for 4M DRAM analysis. Results of the analysis are presented and discussed
Keywords :
automatic test equipment; circuit analysis computing; computerised pattern recognition; failure analysis; integrated circuit testing; integrated memory circuits; random-access storage; 1 Mbit; 4 Mbit; ADVANSTAR network; ADVANTEST T 3332; automatic failbit analysis; automatic program; classification; dynamic random-access memories; failbit map; failbit patterns; fault class distributions; fault pattern recognition; production test program; Automatic testing; Chemical analysis; Chemical technology; Data analysis; Databases; Failure analysis; Fault diagnosis; Optical microscopy; Random access memory; Scanning electron microscopy;
Conference_Titel :
Test Conference, 1989. Proceedings. Meeting the Tests of Time., International
Conference_Location :
Washington, DC
DOI :
10.1109/TEST.1989.82326
