Title :
Sram Access Measurements Using a Picoseoond Photoelectron Scanning Electron Microscope
Author :
Halbout, J.-M. ; May, P. ; Jenkins, K.A. ; Compeau, V.
Author_Institution :
IBM Research Division, Yorktown Heights, NY
Keywords :
Circuit testing; Electron beams; Optical pulse generation; Photoelectron microscopy; Probes; Pulse measurements; Random access memory; Scanning electron microscopy; Spatial resolution; Voltage;
Conference_Titel :
Solid-State Circuits Conference, 1988. Digest of Technical Papers. ISSCC. 1988 IEEE International
Conference_Location :
San Francisco, CA, USA
DOI :
10.1109/ISSCC.1988.663639
