Compact ferroelectric reflection phase shifters at X-band

Author

Serraiocco, J.L. ; Hansen, P.J. ; Taylor, T.R. ; Speck, J.S. ; York, R.A.

Author_Institution

Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA

Volume

3

fYear

2003

Firstpage

1993

Abstract

Compact reflection phase shifters using thin film barium strontium titanate have been developed. X-band designs measuring less than 0.5 mm/sup 2/ are realized by using only lumped element components. The circuits are constructed monolithically, using planar spiral inductors, thin-film resistors, and parallel plate ferroelectric capacitors on a dielectric substrate. A novel low impedance transforming design is used to enhance performance. The first prototypes show promise, giving approximately 14/spl deg//dB. Further process and design improvements will increase performance.

Keywords

MMIC phase shifters; barium compounds; ferroelectric capacitors; integrated circuit design; integrated circuit measurement; strontium compounds; thin film inductors; thin film resistors; BST ferroelectric thin films; BaSrTiO/sub 3/; barium strontium titanate ferroelectric materials; compact ferroelectric reflection phase shifters; lumped element components; microwave phase shifters; parallel plate ferroelectric capacitors; phase shifter low impedance transforming design; planar spiral inductors; thin-film resistors; Barium; Dielectric measurements; Dielectric thin films; Ferroelectric materials; Phase shifters; Reflection; Strontium; Thin film circuits; Thin film inductors; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 2003 IEEE MTT-S International

Conference_Location

Philadelphia, PA, USA

ISSN

0149-645X

Print_ISBN

0-7803-7695-1

Type

conf

DOI

10.1109/MWSYM.2003.1210550

Filename

1210550