DocumentCode
1627683
Title
A model of a 300 mm wafer fabrication line
Author
Campbell, Philip L. ; Rohan, Darius ; MacNair, Edward A.
Author_Institution
Div. of Microelectron., IBM Corp., East Fishkill, NY, USA
Volume
1
fYear
1999
fDate
6/21/1905 12:00:00 AM
Firstpage
909
Abstract
Semiconductor factories are very expensive to build and operate. It is critical to understand how to design and operate them efficiently. We describe a simulation model of a planned 300-mm wafer fabrication line that we are using to make strategic decisions related to the factory
Keywords
integrated circuit manufacture; simulation; strategic planning; 300 mm; planning; semiconductor factories; semiconductor wafer fabrication line; simulation model; strategic decisions; Fabrication; Materials handling; Metrology; Microelectronics; Production facilities; Routing; Sampling methods; Semiconductor device modeling; Vehicles; Virtual manufacturing;
fLanguage
English
Publisher
ieee
Conference_Titel
Simulation Conference Proceedings, 1999 Winter
Conference_Location
Phoenix, AZ
Print_ISBN
0-7803-5780-9
Type
conf
DOI
10.1109/WSC.1999.823305
Filename
823305
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