Title :
Suppression of scattering loss in Erbium-Yttrium Silicate crystalline waveguide fabricated by radical-assisted sputtering
Author :
Nakajima, Takayuki ; Shinagawa, Tatsunori ; Sugawara, Takuya ; Jiang, Yousong ; Kimura, Tadamasa ; Isshiki, Hideo
Author_Institution :
Univ. of Electro-Commun., Chofu, Japan
Abstract :
Er0.45Y1.55SiO5 crystalline waveguide burying Si-guide stripe was fabricated by radical-assisted sputtering (RAS). We evaluated the light propagation properties with pumping at 1.48m. The light propagation loss drastically decreases by 82 cm-1 in the RAS waveguide compared with the previous waveguide by sol-gel.
Keywords :
erbium compounds; light propagation; light scattering; optical fabrication; optical losses; optical materials; optical waveguides; sputtering; yttrium compounds; Er0.45Y1.55SiO5; crystalline waveguide; guide stripe; light propagation; radical assisted sputtering; scattering loss supression; Crystals; Erbium; Green products; Optical pumping; Optical waveguides; Scattering; Sputtering;
Conference_Titel :
Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4577-0826-8
DOI :
10.1109/GROUP4.2012.6324147