DocumentCode
1628219
Title
The state-of-the-art of RF capacitive tunable components (Invited)
Author
Huang, Cong ; Buisman, Koen ; Nanver, Lis K. ; De Vreede, Leo C N
Author_Institution
Delft Inst. of Microsyst. & Nanoelectron., Delft Univ. of Technol., Delft, Netherlands
fYear
2010
Firstpage
619
Lastpage
622
Abstract
An overview is given for the current state-of-the-art of tunable RF elements. For this purpose, tunable RF elements such as thin-film Barium Strontium Titanate (BST) varactors, Micro Electro Mechanical Systems (MEMS) based capacitive switch banks and varactors, as well as semiconductor based capacitive switch banks and varactors are reviewed. Their benefits and shortcomings are discussed and compared for various applications.
Keywords
microswitches; varactors; RF capacitive tunable components; capacitive switch banks; micro electro mechanical systems; thin-film barium strontium titanate varactors; tunable RF elements; Capacitance; Micromechanical devices; Q factor; Radio frequency; Switches; Tuning; Varactors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location
Shanghai
Print_ISBN
978-1-4244-5797-7
Type
conf
DOI
10.1109/ICSICT.2010.5667304
Filename
5667304
Link To Document