• DocumentCode
    1628282
  • Title

    High-fidelity photonic building blocks fabricated using thermal nanoimprint lithography (T-NIL)

  • Author

    Askari, Murtaza ; Atabaki, Amir H. ; Eftekhar, Ali A. ; Adibi, Ali

  • Author_Institution
    Sinoora Inc., Atlanta, GA, USA
  • fYear
    2012
  • Firstpage
    285
  • Lastpage
    287
  • Abstract
    We demonstrate high-fidelity photonic patterns, feature sizes (80nm to 3μm), using T-NIL. Appropriate CAD file design allows complete elimination of residual layer. Our fabricated ultra-compact microdisk resonators show similar quality factors to e-beam written samples.
  • Keywords
    CAD; integrated optics; micromechanical resonators; nanolithography; CAD file design; T-NIL; e-beam; high-fidelity photonic building blocks; quality factors; residual layer; size 80 nm to 3 mum; thermal nanoimprint lithography; ultra-compact microdisk resonators; Fabrication; Lithography; Optical resonators; Optical waveguides; Photonics; Resists; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Group IV Photonics (GFP), 2012 IEEE 9th International Conference on
  • Conference_Location
    San Diego, CA
  • ISSN
    1949-2081
  • Print_ISBN
    978-1-4577-0826-8
  • Type

    conf

  • DOI
    10.1109/GROUP4.2012.6324161
  • Filename
    6324161
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1628282