Title :
Single-sided grooved type or double-sided grooved type resonators manufactured by chemical etching process of two or above steps
Author :
Nagaura, Y. ; Nagaura, Z. ; Nagaura, K. ; Nagato, K. ; Emoto, K. ; Imani, K. ; Kinoshita, K. ; Yokomizo, S. ; Nakazawa, M.
Author_Institution :
Nagaura Lab. Inc., Fukuoka, Japan
fDate :
6/23/1905 12:00:00 AM
Abstract :
Novel quartz resonators of single-sided grooved type and double-sided grooved type in two steps shape are successfully manufactured by chemical etching processes
Keywords :
crystal resonators; etching; surface topography; SiO2; chemical etching; concavo-convex forming mechanism; double-sided grooved type; fundamental frequency; quartz resonators; shape accuracy; shape mapping diagrams; single-sided grooved type; surface accuracy; two steps shape; Apertures; Chemical industry; Chemical processes; Chemical technology; Cities and towns; Electric variables; Etching; Frequency; Manufacturing processes; Shape;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-7028-7
DOI :
10.1109/FREQ.2001.956253
