• DocumentCode
    1630369
  • Title

    Single-sided grooved type or double-sided grooved type resonators manufactured by chemical etching process of two or above steps

  • Author

    Nagaura, Y. ; Nagaura, Z. ; Nagaura, K. ; Nagato, K. ; Emoto, K. ; Imani, K. ; Kinoshita, K. ; Yokomizo, S. ; Nakazawa, M.

  • Author_Institution
    Nagaura Lab. Inc., Fukuoka, Japan
  • fYear
    2001
  • fDate
    6/23/1905 12:00:00 AM
  • Firstpage
    381
  • Lastpage
    389
  • Abstract
    Novel quartz resonators of single-sided grooved type and double-sided grooved type in two steps shape are successfully manufactured by chemical etching processes
  • Keywords
    crystal resonators; etching; surface topography; SiO2; chemical etching; concavo-convex forming mechanism; double-sided grooved type; fundamental frequency; quartz resonators; shape accuracy; shape mapping diagrams; single-sided grooved type; surface accuracy; two steps shape; Apertures; Chemical industry; Chemical processes; Chemical technology; Cities and towns; Electric variables; Etching; Frequency; Manufacturing processes; Shape;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
  • Conference_Location
    Seattle, WA
  • ISSN
    1075-6787
  • Print_ISBN
    0-7803-7028-7
  • Type

    conf

  • DOI
    10.1109/FREQ.2001.956253
  • Filename
    956253
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1630369