Title :
Gas sensor using high-frequency quartz crystal microbalance
Author :
Kurosawa, Shigeru ; Han, Dae-Sang ; Park, Jong-Won ; Aizawa, Hidenobu ; Yoshimoto, Minoru ; Nakamura, Chikashi ; Miyake, Jun ; Chang, Sang-Mok
Author_Institution :
Photonics Res. Inst., Nat. Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan
fDate :
6/23/1905 12:00:00 AM
Abstract :
Fundamental modes (9 & 50 MHz) and overtone modes of 3rd mode of 33 MHz (100(3) MHz) and 5th mode of 20 MHz (100(5) MHz) of quartz crystal microbalances. (QCMs) with high frequencies are studied to increase the frequency response of QCM gas-sensor. On the fundamental and overtone modes, the ratio of mass sensitivity of QCMs calculated from theory is consistent with that of the experimental results
Keywords :
crystal resonators; frequency response; gas sensors; microbalances; 20 MHz; 33 MHz; 50 MHz; 9 MHz; QCM gas-sensor; SiO2; frequency response; frequency shift; fundamental modes; high-frequency quartz crystal microbalance; mass sensitivity; overtone modes; piezoelectric quartz crystal; plasma polymerization; Chemicals; Electrodes; Equations; Frequency response; Gas detectors; Photonic integrated circuits; Piezoelectric films; Plasma chemistry; Plasma materials processing; Polymer films;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-7028-7
DOI :
10.1109/FREQ.2001.956274
