Title :
Hysteresis characteristics vs relative humidity for AT-Cut quartz humidity sensors
Author :
Kuroiwa, Mayumi ; Shimamoto, Yoshiro ; Yasuda, Yuji ; Wakamoto, Satoru ; NAKAZAWA, Mitsuo
Author_Institution :
Fac. of Eng., Shinshu Univ., Nagano, Japan
fDate :
6/23/1905 12:00:00 AM
Abstract :
This paper describes experiments regarding the hysteresis of relative humidity on AT-cut quartz humidity sensors. This research was conducted to investigate principally the mechanism with respect to frequency change, etc. (including the impedance changes and equivalent circuit constant fluctuations) for the above humidity sensors
Keywords :
adsorption; crystal resonators; equivalent circuits; humidity sensors; hysteresis; quartz; AT-cut quartz humidity sensors; SiO2; adsorption of water molecules; circular plano-convex plate resonators; electrode films; equivalent circuit constant fluctuations; frequency change; hysteresis characteristics; impedance changes; quartz resonator; relative humidity; series resonance frequencies; transformation equivalent circuit; Electrodes; Equivalent circuits; Gold; Humidity measurement; Hysteresis; Impedance; Radio frequency; Resonant frequency; Sensor phenomena and characterization; Temperature sensors;
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
Conference_Location :
Seattle, WA
Print_ISBN :
0-7803-7028-7
DOI :
10.1109/FREQ.2001.956283
