• DocumentCode
    1631409
  • Title

    Effect of geometrical electrode defects on the bias and sensitivity of tuning fork angular rate sensor

  • Author

    Bel, O. ; Bourquin, R.

  • Author_Institution
    Ecole Nationale Superieure de Mecanique et des Microtechniques, Besancon, France
  • fYear
    2001
  • fDate
    6/23/1905 12:00:00 AM
  • Firstpage
    502
  • Lastpage
    506
  • Abstract
    In a perfect vibrating beam gyrometer the sensing mode of vibration is only excited by the Coriolis effect and it is assumed that the sensing electrodes do not respond to the primary mode of vibration. This is the case if the shape of the vibrating beam and of the electrodes don´t exhibit geometric defects. In this paper we consider, in a practical point of view, the effect of geometrical defects, like misalignment, of electrodes. These defects can induce a non zero output signal (called the bias) when the gyrometer doesn´t rotate and, in a less part, an alteration of the scale factor. We restrict our attention to small defects, which induce only a small dissymmetry of electrodes with respect to the symmetric axis of the beam. The method used to compute the amplitude of vibration, as well as the output current, needs to determine the static electric field in the cross section of the sensor. To do that we use an approximated method based on the decomposition of the electric potential in Fourier series. Although we here consider a tuning fork device, all what is presented is obviously valid for a single beam rate sensor
  • Keywords
    Coriolis force; Fourier series; angular velocity measurement; crystal resonators; eigenvalues and eigenfunctions; electrodes; gyroscopes; vibrations; Bernouilli approximation; Coriolis effect; Fourier series; eigenmodes/eigenvalues; electric potential; geometrical electrode defects; geometrical misalignment; nonzero output signal; perfect vibrating beam gyrometer; pure Z-cut quartz plate; scale factor; sensing bias; sensitivity; single beam rate sensor; small defects; tuning fork angular rate sensor; Angular velocity; Capacitive sensors; Electric potential; Electrodes; Equations; Q factor; Resonant frequency; Shape; Vibrations; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
  • Conference_Location
    Seattle, WA
  • ISSN
    1075-6787
  • Print_ISBN
    0-7803-7028-7
  • Type

    conf

  • DOI
    10.1109/FREQ.2001.956287
  • Filename
    956287