Title :
Analysis of process impact on local variability thanks to addressable transistors arrays
Author :
Cros, A. ; Quemerais, Thomas ; Bajolet, A. ; Carminati, Yann ; Normandon, Philippe ; Kergomard, Flore ; Planes, N. ; Petit, D. ; Arnaud, F. ; Rosa, J.
Author_Institution :
TR&D/STD/TPS ECR, STMicroelectron., Crolles, France
Abstract :
We designed an addressable transistors array to analyse local variability at the wafer scale. On FDSOI substrates, we measure no impact of the silicon thickness variations on short channel transistors, and demonstrate that the impact on large area transistors is no more visible when the Tsi is well controlled.
Keywords :
MOSFET; silicon; silicon-on-insulator; substrates; thickness control; FDSOI substrate; Si; addressable transistors array; controlled Tsi; fully depleted silicon on insulator; large area transistor; local variability; process impact analysis; short channel transistor; silicon film thickness; silicon thickness variation; wafer scale; Logic gates; MOS devices; Silicon; Stochastic processes; Substrates; Transistors; Very large scale integration; SOI; Variability; addressable transistors; matching;
Conference_Titel :
Microelectronic Test Structures (ICMTS), 2014 International Conference on
Conference_Location :
Udine
Print_ISBN :
978-1-4799-2193-5
DOI :
10.1109/ICMTS.2014.6841498
