A cross-coupled common centroid test structures layout method for high precision MIM capacitor mismatch measurements

A new test structure layout method utilizing highly symmetrical quadruple DUT-to-pad connection rails enables much higher precision DUT-1-2-1-2 MIM capacitors mismatch characterization and gives significantly smaller systematic mismatch errors compared to approaches attempted before. A record low random mismatch fluctuation standard deviation of 20 ppm (0.002%)is shown to be measurable for large MIM capacitor pairs.