Title :
Statistical IC process and product simulation using STADIUM
Author :
Means, Dale P. ; Sanders, Thomas J.
Author_Institution :
Div. of Electr. & Comput. Sci. & Eng., Florida Inst. of Technol., Melbourne, FL, USA
Abstract :
The software program called STADIUM has been developed by researchers at Florida Institute of Technology (Florida Tech) through funding from SEMATECH. The purpose of STADIUM is to facilitate the statistical design and simulation of integrated circuit processes, devices and products. It is a software shell which uses existing simulators in a design of experiments statistical methodology and allows the estimation of the statistical response of the manufacturing environment. This paper presents some of the methodology and implementation details of STADIUM.
Keywords :
circuit CAD; circuit analysis computing; design for manufacture; integrated circuit design; integrated circuit modelling; integrated circuit yield; statistical analysis; Florida Institute of Technology; STADIUM; estimation; integrated circuit processes; manufacturing environment; product simulation; software program; software shell; statistical IC process; statistical design; statistical response; Analytical models; CMOS process; Circuit optimization; Circuit simulation; Design methodology; Manufacturing processes; Predictive models; Response surface methodology; Statistical analysis; Virtual manufacturing;
Conference_Titel :
Southcon/94. Conference Record
Conference_Location :
Orlando, FL, USA
Print_ISBN :
0-7803-9988-9
DOI :
10.1109/SOUTHC.1994.498170