DocumentCode :
1632587
Title :
Analysis of a SAW-BAW mutual transducer of finite length on piezoelectric substrates
Author :
Dulmet, Bernard
Author_Institution :
Lab. de Chronometrie Electronique et Piezolectricite, ENSMM, Besancon, France
fYear :
2001
fDate :
6/23/1905 12:00:00 AM
Firstpage :
514
Lastpage :
519
Abstract :
This paper outlines the modeling of strong reciprocal couplings occurring on periodically corrugated piezoelectric substrates between SAWS (or STWs) propagating in their second stop band, i.e. with a wavelength close to the period of corrugations, and BAWs propagating either into or from the depth of substrate. The solution is classically expanded as series of Bloch functions allowing to obey periodic boundary conditions on the external surface. Those boundary conditions are actually taken into account by a simple integral method accessing the Fourier coefficients of the periodic part of effective stresses and induction on the free boundary of substrate. Treatment of piezoelectric effect is detailed together with issues regarding the effect of anisotropy, and results obtained on structures containing a finite number of gratings are briefly explained. The influence of the number of grooves on the energy conversion ratios is described
Keywords :
Fourier series; boundary-value problems; bulk acoustic wave devices; eigenvalues and eigenfunctions; periodic structures; surface acoustic wave transducers; Bloch functions; Floquet analysis; Fourier coefficients; Rayleigh waves; SAW-BAW mutual transducer; anisotropy effect; dispersion curves; eigenmodes; finite length; finite number of gratings; integral method; modeling; periodic boundary conditions; periodically corrugated substrates; piezoelectric substrates; second stop band; strong reciprocal couplings; Anisotropic magnetoresistance; Boundary conditions; Corrugated surfaces; Gratings; Integral equations; Piezoelectric effect; Piezoelectric transducers; Sawing machines; Stress; Surface treatment;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International
Conference_Location :
Seattle, WA
ISSN :
1075-6787
Print_ISBN :
0-7803-7028-7
Type :
conf
DOI :
10.1109/FREQ.2001.956333
Filename :
956333
Link To Document :
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