A bulk acoustic wave resonator for sensing liquid electrical property changes

Author

Zhang, Chao ; Vetelino, John F.

Author_Institution

Lab. for Surface Sci. & Technol., Maine Univ., Orono, ME, USA

fYear

2001

fDate

6/23/1905 12:00:00 AM

Firstpage

535

Lastpage

541

Abstract

A thickness shear mode (TSM) bulk acoustic wave (BAW) sensor for liquid electrical property (conductivity and dielectric constant) measurements is presented. This sensor, which is configured as a resonator structure, employs a sensing electrode geometry, which allows the accurate measurement of the liquid electrical properties. The frequency response of the sensor has been measured in both conductive (NaCl) and non-conductive (2-proponal) solutions. A theoretical model has been developed to describe the sensor operating in liquids and the calculated impedance is shown to agree well with the measured impedance. The sensitivity of this sensor to the change in liquid dielectric constant has been determined. Compared with other sensing technologies, the present sensor may provide a more reliable, portable and low cost solution for on-line monitoring of the liquid electrical property changes

Keywords

acoustic analysis; bulk acoustic wave devices; crystal resonators; electrical conductivity measurement; equivalent circuits; frequency response; permittivity measurement; 2-proponal solutions; AT-cut sensors; bulk acoustic wave resonator; conductive solutions; dielectric constant; electrical conductivity; equivalent circuit models; frequency response; liquid electrical property measurements; on-line monitoring; quartz sensors; sensing electrode geometry; thickness shear mode BAW sensor; Acoustic measurements; Acoustic sensors; Acoustic waves; Conductivity measurement; Dielectric constant; Dielectric measurements; Electric variables measurement; Electrodes; Impedance; Thickness measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Frequency Control Symposium and PDA Exhibition, 2001. Proceedings of the 2001 IEEE International

Conference_Location

Seattle, WA

ISSN

1075-6787

Print_ISBN

0-7803-7028-7

Type

conf

DOI

10.1109/FREQ.2001.956336

Filename

956336