An acceleration latching switch with flexible contacts and barb latching mechanism

Author

Zhang, X.Y. ; Guo, Z.Y. ; Ding, H.T. ; Yang, Z.C. ; Yan, G.Z.

Author_Institution

Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China

fYear

2010

Firstpage

1495

Lastpage

1497

Abstract

A micro-acceleration latching switch with barb latching mechanism is presented in this paper. The latching mechanism which likes a “barb” can make the switch latch reliably. What´s more, the flexible contacts can prevent the switch from opening due to impact resulting from the rebound or vibration of proof mass when the switch is latched. The stops which limit displacement will also improve the reliability of the switch. The switch was fabricated by low-cost process and tested. The measured latching shock is 1700 g and the response time is less than 0.3 ms. The isolation resistance is more than 200 M ohms and the on-state resistance is no more than 15 ohms.

Keywords

electric resistance; isolation technology; microswitches; semiconductor device reliability; barb latching; flexible contact; isolation resistance; microacceleration latching switch; on-state resistance; switch latch reliability; Acceleration; Contacts; Electric shock; Fabrication; Micromechanical devices; Sensors; Switches;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on

Conference_Location

Shanghai

Print_ISBN

978-1-4244-5797-7

Type

conf

DOI

10.1109/ICSICT.2010.5667522

Filename

5667522