Title :
The application of advanced manufacturing technology in semiconductor fabrication
Author :
Miller, David J. ; Fenimore, James A.
Author_Institution :
IBM Gen. Technol. Div., Essex Junction, VT, USA
Abstract :
An overview is presented of manufacturing techniques being pursued in a development line in support of advanced semiconductor production. Described are methods used to analyze alternate manufacturing techniques to provide leading-edge products in production volumes with aggressive defect reduction, process control, and turnaround time capability. Also outlined are the benefits associated with improved manufacturing techniques. Two examples are given.<>
Keywords :
VLSI; integrated circuit manufacture; advanced manufacturing technology; advanced semiconductor production; aggressive defect reduction; development line; examples; leading-edge products; manufacturing techniques; overview; process control; production volumes; semiconductor fabrication; turnaround time capability; Computer integrated manufacturing; Costs; Fabrication; Face; Lead compounds; Manufacturing automation; Manufacturing processes; Process control; Production facilities; Semiconductor device manufacture;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1988, Design-to-Manufacturing Transfer Cycle. Fifth IEEE/CHMT International
Conference_Location :
Lake Buena Vista, FL, USA
DOI :
10.1109/EMTS.1988.16177
