DocumentCode
1634222
Title
Ultra low power solenoid MEMS fluxgate sensor with amorphous alloy core
Author
Lei, Chong ; Chen, Lei ; Zhou, Yong ; Zhou, Zhimin
Author_Institution
Nat. Key Lab. of Nano/Micro Fabrication Technol., Shanghai Jiao Tong Univ., Shanghai, China
fYear
2010
Firstpage
1471
Lastpage
1473
Abstract
A novel micromachined fluxgate sensor with integrated solenoid coils and amorphous alloy core is developed. The ultra low power consumption is achieved due to amorphous alloys ribbon materials and optimized core structure. The device exhibits a power consumption of 2.4mW, a sensitivity of 55V/T and a linear range of -150μT-150μT as excitation current of 40mA at 40kHz.
Keywords
amorphous state; low-power electronics; micromachining; microsensors; solenoids; amorphous alloy core; current 40 mA; frequency 40 kHz; integrated solenoid coils; micromachined fluxgate sensor; power 2.4 mW; ultra low power solenoid MEMS fluxgate sensor; Coils; Low power electronics; Magnetic cores; Metals; Micromechanical devices; Power demand; Solenoids;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location
Shanghai
Print_ISBN
978-1-4244-5797-7
Type
conf
DOI
10.1109/ICSICT.2010.5667546
Filename
5667546
Link To Document