Title :
Ultra low power solenoid MEMS fluxgate sensor with amorphous alloy core
Author :
Lei, Chong ; Chen, Lei ; Zhou, Yong ; Zhou, Zhimin
Author_Institution :
Nat. Key Lab. of Nano/Micro Fabrication Technol., Shanghai Jiao Tong Univ., Shanghai, China
Abstract :
A novel micromachined fluxgate sensor with integrated solenoid coils and amorphous alloy core is developed. The ultra low power consumption is achieved due to amorphous alloys ribbon materials and optimized core structure. The device exhibits a power consumption of 2.4mW, a sensitivity of 55V/T and a linear range of -150μT-150μT as excitation current of 40mA at 40kHz.
Keywords :
amorphous state; low-power electronics; micromachining; microsensors; solenoids; amorphous alloy core; current 40 mA; frequency 40 kHz; integrated solenoid coils; micromachined fluxgate sensor; power 2.4 mW; ultra low power solenoid MEMS fluxgate sensor; Coils; Low power electronics; Magnetic cores; Metals; Micromechanical devices; Power demand; Solenoids;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-5797-7
DOI :
10.1109/ICSICT.2010.5667546
