Title :
Electrical and testing reliability of CuxO based RRAM
Author :
Wan, Haijun ; Tian, Xiaopeng ; Song, Yali ; Luo, Wenjin ; Wang, Ming ; Wang, Yanliang ; Zhou, Peng ; Lin, Yinyin
Author_Institution :
ASIC & Syst. State Key Lab., Fudan Univ., Shanghai, China
Abstract :
This work studies the electrical and testing reliability issues of CuxO based RRAM (Resistive Random Access Memory). Firstly, we study the most important electrical reliability issue-data retention capability, and propose a filament/charge trap combined model to clarify the retention failure mechanism. Secondly, we respectively study the reliability problems caused by the SET compliance current in 1R-architecture and 1T1R-architecture devices during the electrical testing, and observe the compliance current overshoot phenomenon for the first time in 1R-architecture device by using a self-build compliance current capturing system.
Keywords :
copper compounds; integrated circuit reliability; integrated circuit testing; random-access storage; 1T1R-architecture devices; CuxO; RRAM; SET compliance current; electrical reliability; electrical reliability issue-data retention capability; electrical testing; filament-charge trap combined model; resistive random access memory; retention failure mechanism; self-build compliance current capturing system; Copper; Equations; Mathematical model; Parasitic capacitance; Reliability; Testing; Transistors;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-5797-7
DOI :
10.1109/ICSICT.2010.5667559