Title :
A low-noise interface circuit for MEMS vibratory gyroscope
Author :
Fang, Ran ; Lu, Wengao ; Liu, Chang ; Chen, Zhongjian ; Ju, Yuan ; Wang, Guannan ; Ji, Lijiu ; Yu, Dunshan
Author_Institution :
Dept. of Microelectron., Peking Univ., Beijing, China
Abstract :
A CMOS ASIC has been designed and implemented for readout and control of MEMS vibratory gyroscopes. A low noise design is achieved by using the technique of sinusoidal chopper stabilization with a chopping frequency of 2MHz, which will effectively suppress the low frequency noise. A closed loop control method in driving mode is presented. The Chip is fabricated in a 0.35μm standard CMOS process with an area of 2.5×2.5mm2. The test is performed with a vibratory gyroscope on the condition of closed-loop control, and the measurement result shows a detecting resolution of 6aF in 100Hz bandwidth from a single 5V supply.
Keywords :
CMOS integrated circuits; closed loop systems; gyroscopes; micromechanical devices; readout electronics; CMOS ASIC; MEMS vibratory gyroscope control; MEMS vibratory gyroscope readout; capacitance 6 aF; closed loop control method; closed-loop control; driving mode; frequency 100 Hz; frequency 2 MHz; low frequency noise suppression; low noise design; low-noise interface circuit; sinusoidal chopper stabilization; size 0.35 mum; voltage 5 V; Application specific integrated circuits; Capacitance; Gyroscopes; Low pass filters; Micromechanical devices; Noise; Oscillators;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-5797-7
DOI :
10.1109/ICSICT.2010.5667561
