Title :
Single-walled carbon nanotue pirani vacuum gauge
Author :
Li, Wei ; Wang, Zhihui ; Zhang, Jinwen
Author_Institution :
Nat. Key Lab. of Sci. & Technol. on Micro/Nano Fabrication, Peking Univ., Beijing, China
Abstract :
This paper presents the design, fabrication and synthesis of a carbon nanotube Pirani vacuum gauge which comprises 5-μm-long SWNTs as heater and Au/W as electrodes. Results show that the TCR of SWNTs is negative and about -0.004/°C. SWNTs Pirani vacuum gauge was demonstrated with a dynamic range of 2500Pa to 40Pa in air environment. The average sensitivity of SWNTs Pirani vacuum gauge is about 914Ω/Pa and the power consumption is lower than10μW.
Keywords :
carbon nanotubes; electric heating; electrodes; power consumption; vacuum gauges; Pirani vacuum gauge; electrode; heater; power consumption; single-walled carbon nanotube; size 5 mum; Electrodes; Heat sinks; Heating; Resistance; Sensitivity; Temperature measurement; Thermal conductivity;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
Conference_Location :
Shanghai
Print_ISBN :
978-1-4244-5797-7
DOI :
10.1109/ICSICT.2010.5667603
