Shaping nanomembrane technologies

Shaped nanomembranes offer huge potential for integration of novel devices and device concepts on a single chip. We show that strained nanomembranes can form into long-range-ordered wrinkled patterns on rigid and soft substrates, which is exploited to create nanofluidic channel systems and stretchable/flexible magnetoelectronic devices. Nanomembranes can also roll-up into tubular geometries, offering a highly integrative platform for ultra-compact multi-functional devices. We have realised vertical flexible ring resonators and powerful optofluidic devices relying on released and rolled-up SiO nanomembranes. The same technology is able to generate in a highly parallel fashion self-wound capacitor and battery devices, which might be able to drive complex autonomous systems at the micro-/nanoscale. The inner wall of rolled-up tubes can easily be functionalized with organic molecules and opens up intriguing options to couple fully engineered systems to the chemical/biological world.