Title :
Study torque ripple of the side-drive electrostatic micromotor
Author :
Behjat, V. ; Vahedi, A.
Author_Institution :
Dept. of Electr. Eng., Iran Univ. of Sci. & Technol., Tehran, Iran
Abstract :
The torque ripple of the side-drive electrostatic micromotor is studied. A practical design of a side-drive electrostatic micromotor has been analyzed, using 2D numerical finite element method. Several excitation sequences have been studied for minimizing the torque ripple and the optimal excitation sequence has been used to supply the micromotor. The effects of geometric parameters on the torque ripple have been studied. These parameters are: stator tooth width; rotor tooth width; slot radius. To determine the effects of these parameters, they are varied in certain steps.
Keywords :
electrostatic motors; finite element analysis; minimisation; rotors; stators; torque; 2D numerical finite element method; excitation sequences; geometric parameters; rotor tooth width; side-drive electrostatic micromotor; slot radius; stator tooth width; torque ripple minimization; Breakdown voltage; Electrodes; Electrostatic analysis; Finite element methods; Microelectromechanical systems; Micromotors; Optical device fabrication; Stators; Teeth; Torque;
Conference_Titel :
Universities Power Engineering Conference, 2004. UPEC 2004. 39th International
Conference_Location :
Bristol, UK
Print_ISBN :
1-86043-365-0
