Title :
A simple scheme for implementing wave absorption in quasi-neutral simulations of ECR plasmas
Author_Institution :
Div. of Plasma Phys., Naval Res. Lab., Washington, DC, USA
Abstract :
Summary form only given. The NRL program in modeling of high density plasma processing reactors is currently focusing on the ECR reactor. This is characterized by a long mean free path for both electrons and ions, but where self electrostatic fields also play an important role. However since plasma frequency time scales and Debye length scales are very short compared to other times and lengths of interest, neither a fluid formulation nor a full particle simulation are the optimum modeling tool. Accordingly the modeling effort has focused on the development of a quasi-neutral particle simulation technique. The one thing not modelled up to now is the power deposition in the plasma from the incident wave. This paper develops a scheme for modeling wave absorption.
Keywords :
plasma diagnostics; plasma simulation; plasma waves; Debye length scales; ECR plasmas; NRL program; electrons; fluid formulation; full particle simulation; high density plasma processing reactors; incident wave; ions; long mean free path; modelling tool; plasma frequency time scales; power deposition; quasi-neutral particle simulation; quasi-neutral simulations; self electrostatic fields; wave absorption; wave absorption modelling; Absorption; Electrons; Inductors; Physics; Plasma density; Plasma materials processing; Plasma measurements; Plasma simulation; Plasma sources; Plasma waves;
Conference_Titel :
Plasma Science, 1998. 25th Anniversary. IEEE Conference Record - Abstracts. 1998 IEEE International on
Conference_Location :
Raleigh, NC, USA
Print_ISBN :
0-7803-4792-7
DOI :
10.1109/PLASMA.1998.677765