Analytical modeling of thermal processes in gas microsensors operating at high temperature

The analytical method is presented to determine the temperature distribution in gas microsensors operating at high temperatures. The 2D structure of a gas microsensor is devided into regions, the temperature distribution in which is found by the eigenfunction method. To take into account the temperature dependencies parameters the iteration procedure is used. The values of the parameters are determined using the weighted mean temperature in each region. The application of this method is considered on the example of the gas microsensor based on proton conducting solid electrolyte.