Title :
Highly sensitive thin film magnetoresistive sensor with good linearity
Author :
Endoh, M. ; Shimizu, N. ; Yoda, H. ; Waoatsuki, N.
Abstract :
A linear magnetoresistive (MR) sensor that does not need a bias magnetic field was developed by using permalloy thin film. The barber-pole structure was adopted, and values were calculated using the boundary-element method to design conductor patterns that give a symmetrical output. The film construction and manufacturing process are carefully examined. A highly sensitive MR sensor with good linearity, no hysteresis, and good temperature characteristics is realized.<>
Keywords :
electric sensing devices; magnetic field measurement; magnetoresistance; resistors; thin film devices; barber-pole structure; boundary-element method; conductor patterns design; film construction; hysteresis; linear sensor; linearity; manufacturing process; permalloy thin film; sensitive MR sensor; sensitivity; symmetrical output; temperature characteristics; thin film magnetoresistive sensor; Conductors; Design methodology; Linearity; Magnetic films; Magnetic sensors; Magnetoresistance; Manufacturing processes; Sensor phenomena and characterization; Temperature sensors; Thin film sensors;
Conference_Titel :
Electronic Manufacturing Technology Symposium, 1988, Design-to-Manufacturing Transfer Cycle. Fifth IEEE/CHMT International
Conference_Location :
Lake Buena Vista, FL, USA
DOI :
10.1109/EMTS.1988.16179
