• DocumentCode
    1640634
  • Title

    A new extraction method for source/drain resistance in MOSFETs

  • Author

    Chang, Yang-Hua ; Liu, Yao-Jen

  • Author_Institution
    Grad. Sch. of Optoelectron., Nat. Yunlin Univ. of Sci. & Technol., Yunlin, Taiwan
  • fYear
    2010
  • Firstpage
    1910
  • Lastpage
    1912
  • Abstract
    A new procedure to determine source/drain series resistance and effective channel length has been developed for MOSFETs operated in linear region. The gate-bias dependence of source/drain resistance is considered by differential and integration processes. This new-developed procedure has been applied to devices with mask channel lengths of 0.23, 0.2, and 0.185 μm. The parameters extracted with this procedure have been validated by measured I-V characteristics.
  • Keywords
    MOSFET; differential equations; electric resistance; integration; I-V characteristics; MOSFET; channel length; differential process; extraction method; gate-bias dependence; integration process; size 0.185 mum; size 0.2 mum; size 0.23 mum; source/drain series resistance; Current measurement; Logic gates; MOSFETs; Resistance; Semiconductor device measurement; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State and Integrated Circuit Technology (ICSICT), 2010 10th IEEE International Conference on
  • Conference_Location
    Shanghai
  • Print_ISBN
    978-1-4244-5797-7
  • Type

    conf

  • DOI
    10.1109/ICSICT.2010.5667774
  • Filename
    5667774