Fabrication of spiral phase plates for optical vortices

Author

Tudor, Rebeca ; Kusko, Mihai ; Kusko, Cristian ; Craciunoiu, F. ; Avram, Andrei ; Vasilache, Dan

Author_Institution

Nat. Inst. for R&D in Microtechnol., Bucharest, Romania

fYear

2014

fDate

13-15 Oct. 2014

Firstpage

139

Lastpage

142

Abstract

This work presents a reproductible fabrication process of spiral phase plates (SPPs) based on microfabrication techniques such as photolithography and reactive ion etching (RIE). The fabricated SPPs operate in the reflection mode in order to generate optical vortices with topological charge m = 2 and m = 4. Structural and functional characterizations prove the optical quality of the fabricated SPP.

Keywords

diffractive optical elements; light reflection; microfabrication; optical fabrication; optical testing; optical vortices; photolithography; sputter etching; RIE; SPP; functional characterizations; microfabrication techniques; optical quality; optical vortices; photolithography; reactive ion etching; reflection mode; reproductible fabrication process; spiral phase plate fabrication; structural characterizations; topological charge; Etching; Laser beams; Optical device fabrication; Optical diffraction; Optical reflection; Optical vortices; Spirals; optical vortex; spiral phase plate; topological charge;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2014 International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-4799-3916-9

Type

conf

DOI

10.1109/SMICND.2014.6966416

Filename

6966416