An innovative procedure for the synthesis of MEMS capacitive switches

Author

Bartolucci, G. ; de Angelis, G. ; Lucibello, A. ; Marcelli, R. ; Proietti, E.

Author_Institution

Dept. of Electron. Eng., Univ. of Roma Tor Vergata, Rome, Italy

fYear

2014

fDate

13-15 Oct. 2014

Firstpage

175

Lastpage

178

Abstract

This paper is focused on the design of the transmission lines utilized in microelectromechanical capacitive shunt connected switches. These transmission lines sections are employed as matching elements to improve the performance of the component in the on state. The image phase parameter is used to develop an analytic procedure for the synthesis of such transmission lines. The proposed method is applied for the design of a switch, adopting for the capacitive element the experimental data of a microelectromechanical device previously realized by the authors.

Keywords

microswitches; transmission lines; MEMS capacitive switches synthesis; analytic procedure; capacitive element; image phase parameter; innovative procedure; matching elements; microelectromechanical capacitive shunt connected switches; performance improvement; transmission line section design; Bridge circuits; Impedance; Micromechanical devices; Microwave circuits; Microwave imaging; Radio frequency; coplanar waveguide; image parameter; microelectromechanical switches; microwaves;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Conference (CAS), 2014 International

Conference_Location

Sinaia

ISSN

1545-827X

Print_ISBN

978-1-4799-3916-9

Type

conf

DOI

10.1109/SMICND.2014.6966426

Filename

6966426