Title :
Power supply architecture for high temperature chuck systems
Author :
Teodorescu, Laurentiu ; Gheorghe, Andrei-Sorin ; Draghici, F. ; Brezeanu, G. ; Rusu, Irena
Author_Institution :
Univ. Politeh. of Bucharest, Bucharest, Romania
Abstract :
A supply technique used for an electric heating resistor mounted inside a thermal chuck system which supports wafer testing in high temperatures domain is described in this paper. Following this technique, a platform for low noise wafer measurements may be develop.
Keywords :
electric heating; resistors; semiconductor device testing; thermal management (packaging); electric heating resistor; high temperature chuck systems; low noise wafer measurements; power supply architecture; thermal chuck system; wafer testing; Heating; Microcontrollers; Noise; Power supplies; Temperature measurement; Voltage control; Voltage measurement; low noise measurements; thermal chuck; thermal management; wafer testing; wide band semiconductor testing;
Conference_Titel :
Semiconductor Conference (CAS), 2014 International
Conference_Location :
Sinaia
Print_ISBN :
978-1-4799-3916-9
DOI :
10.1109/SMICND.2014.6966432
