On dynamic behavior of triangular shaped cantilevers in MEMS sensors: Effect of curvature

A study on the effect of curvature of triangular shaped cantilevers in MEMS sensors was presented. 3-D models were performed by using the SolidWorks software. And modal analysis and harmonic response analysis were carried out on different types of geometrically configured triangular shaped cantilevers using ANSYS software. The results included the variation of natural frequencies of cantilevers and maximum equivalent von mises strain on the cantilevers with respect to radius of curvature of triangular shaped cantilevers. According to the finite element analysis results, the curvature did affect dynamic behavior of triangular shaped cantilevers in MEMS sensors. Usually, the curvature is induced by the surface stress due to microprocessing or any change of temperature, etc. Therefore, in order to achieve a steady state of strain for the MEMS sensors, it´s better to eliminate the surface stress and make the cantilever transform from a curved cantilever to a straight cantilever.